Ren, F. ; Abernathy, C. R. ; Shurman, M. ; Hong, M. ; Pearton, S. J. ; Lothian, J. R.
Pub. info.:
Advanced interconnects and contact materials and processes for future integrated circuits : symposium held April 13-16, 1998, San Francisco, California, U.S.A.. pp.451-, 1998. Warrendale, Pa.. MRS - Materials Research Society