1.

Conference Proceedings
Conference Proceedings
1. Assembly and alignment of three-aspherical-mirror optics for extreme ultraviolet projection lithography
Sugisaki,K. ; Oshino,T. ; Murakami,K. ; Watanabe,T. ; Kinoshita,H. ; Miyafuji,A. ; Irie,S. ; Shirayone,S.
Pub. info.: Emerging lithographic technologies IV : 28 February-1 March 2000, Santa Clara, USA.  pp.751-758,  2000.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3997
2.

Conference Proceedings
Conference Proceedings
2. Recent advances of three-aspherical-mirror system for EUVI
Kinoshita,H. ; Watanabe,T. ; Li,Y. ; Miyafuji,A. ; Oshino,T. ; Sugisaki,K. ; Murakami,K. ; Irie,S. ; Shirayone,S. ; Okazaki,S.
Pub. info.: Emerging lithographic technologies IV : 28 February-1 March 2000, Santa Clara, USA.  pp.70-75,  2000.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3997
3.

Conference Proceedings
Conference Proceedings
3. Lithographic performance and optimization of chemically amplified single-layer resists for EUV lithograph
Watanabe,T. ; Kinoshita,H. ; Miyafuji,A. ; Irie,S. ; Shirayone,S. ; Mori,S. ; Yano,E. ; Hada,H. ; Ohmori,K. ; Komano,H.
Pub. info.: Emerging lithographic technologies IV : 28 February-1 March 2000, Santa Clara, USA.  pp.600-607,  2000.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3997
4.

Conference Proceedings
Conference Proceedings
4. Control of line edge roughness of ultrathin resist films subjected to EUV exposure
Ryoo,M. ; Shirayone,S. ; Oizumi,H. ; Matsuzawa,N.N. ; Irie,S. ; Yano,E. ; Okazaki,S.
Pub. info.: Advances in Resist Technology and Processing XVIII.  4345  pp.903-911,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4345