1.

Conference Proceedings
Conference Proceedings
1. The Dielectric Breakdown Characteristics of MOS Capacitor of Cz-Si Wafer
Furukawa, J. ; Shiota, T. ; Kida, M. ; Shingyouji, T. ; Shimanuki, Y.
Pub. info.: Proceedings of the Electrochemical Society Symposium on Diagnostic Techniques for Semiconductor Materials and Devices.  pp.342-349,  1997.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 97-12
2.

Conference Proceedings
Conference Proceedings
2. DISTRIBUTION OF AS-GROWN DEFECTS IN A SILICON SINGLE CRYSTAL
Nakajima, K. ; Furukawa, J. ; Furuya, H. ; Shingyouji, T.
Pub. info.: Proceedings of the Seventh International Symposium on Silicon Materials Science and Technology.  pp.168-179,  1994.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1994-10
3.

Conference Proceedings
Conference Proceedings
3. Adsorption and Desorption of Contaminant Metals on Si Wafer Surface in SC1 Solution
Maeda, G. ; Takahashi, I. ; Kondo, H. ; Ryuta, J. ; Shingyouji, T.
Pub. info.: Ultraclean semiconductor processing technology and surface chemical cleaning and passivation : Symposum held April 17-19, 1995, San Francisco, California, USA.  pp.195-,  1995.  Pittsburgh, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 386
4.

Conference Proceedings
Conference Proceedings
4. The Effect of COP on the Dielectric Breakdown Characteristics of Silicon MOS Capacitor
Shiota, T. ; Morita, E. ; Furukawa, J. ; Furuya, H. ; Shingyouji, T. ; Shimanuki, Y.
Pub. info.: Proceedings of the Symposium on Contamination Control and Defect Reduction in Semiconductor Manufacturing II.  pp.211-221,  1994.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1994-3
5.

Conference Proceedings
Conference Proceedings
5. Effect of Bulk Microdefects Induced in Silicon by Heat Treatment on the Leakage Current of pn Junctions
Murakami, Y. ; Satou, Y. ; Furuya, H. ; Abe, H. ; Shingyouji, T.
Pub. info.: Proceedings of the Symposium on the Degradation of Electronic Devices due to Device Operation as well as Crystalline and Process-Induced Defects.  pp.82-93,  1994.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1994-1