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Conference Proceedings

1. Heteroepitaxial Layer Overgrowth of GaP on Structured Silicon Surfaces

Sukidi, N. ; Dietz, N. ; Bachmann, K.J. ; Shingubara, S. ; Yokoyama, S.

Pub. info.:	Proceedings of the twenty-sixth State-of-the-Art Program on Compound Semiconductors (SOTAPOCS XXVI). pp.24-29, 1997. Pennington, NJ. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	97-1

Conference Proceedings

2. TEM OBSERVATION OF THE DAMAGES IN HEAVILY ION-IMPLANTED FINE Si COLUMNS

Shingubara, S. ; Sukesako, H. ; Kawasaki, T. ; Inoue, K. ; Matusi, Y. ; Sakaue, H. ; Takahagi, T. ; Horiike, Y.

Pub. info.:	Beam-solid interactions for materials synthesis and characterization : symposium held November 28-December 2, 1994, Boston, Massachusetts, U.S.A.. pp.641-, 1995. Pittsburgh, Pa.. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	354

Conference Proceedings

3. Cu Deposition Characteristics into Submicron Contact Holes Employing Self-Sputtering with a High Ionization Rate

Shingubara, S. ; Sano, A. ; Sakaue, H. ; Takahagi, T. ; Horiike, Y. ; Radzimski, Z. J. ; Posadowski, W. M.

Pub. info.:	Advanced metallization for future ULSI : symposium held April 8-11, 1996, San Francisco, California, U.S.A.. pp.185-, 1996. Pittsburgh, Pa.. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	427

Conference Proceedings

4. Electromigration Reliability Study of a GMR Spin Valve Device

Shingubara, S. ; Takeda, Y. ; Sakue, H. ; Takahagi, T. ; Verbruggen, A. H.

Pub. info.:	Materials reliability in microelectronics IX : symposium held April 6-8, 1999, San Francisco, California, U.S.A.. pp.145-, 1999. Pittsburgh, Pa.. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	563

Conference Proceedings

5. In Situ Observation of Thermal Stress in Nano-Size Thin Aluminum Films

Hanabusa, T. ; Kusaka, K. ; Shingubara, S. ; Sakata, O.

Pub. info.:	Residual stresses VII : ICRS 7 : proceedings of the 7th International Conference on Residual Stresses, ICRS-7 Xi'an, China, 14-17, June, 2004. pp.577-582, 2005. Uetikon-Zuerich, Switzerland. Trans Tech Publications
Title of ser.:	Materials science forum
Ser. no.:	490-491

Conference Proceedings

6. MOLECULAR DYNAMICS OF VOID MOVEMENT DUETO ELECTROMIGATION

Shingubara, S. ; Fujii, T. ; Horiike, Y.

Pub. info.:	Proceedings of the Third International Symposium on Process Physics and Modeling in Semiconductor Technology. pp.263-270, 1993. Pennington, NJ. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	1993-6

Conference Proceedings

7. Formation of Al Nanodot Array by the Combination of Nano-Indentation and Anodic Oxidation

Shingubara, S. ; Murakami, Y. ; Morimoto, K. ; Sakaue, H. ; Takahagi, T.

Pub. info.:	Nanopatterning : from ultralarge-scale integration to biotechnology : symposium held November 25-29, 2001, Boston, Massachusetts, U.S.A.. pp.133-138, 2002. Warrendale, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	705

Conference Proceedings

8. Initial Stage of Titanium Silicide Formation on Si(111) Substrate

Shingubara, S. ; Takata, S. ; Takahashi, E. ; Konagata, S. ; Sakaue, H. ; Takahagi, T.

Pub. info.:	Silicide thin films - fabrication, properties, and applications : Symposium held November 27-30, 1995, Boston, Massachusetts, USA. pp.137-, 1996. Pittsburgh. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	402

Conference Proceedings

9. Void Elongation Phenomena Observed in Polycrystalline Cu Interconnects at High Current Density Stressing Conditions

Shingubara, S. ; Kajiwara, S. ; Osaka, T. ; Sakaue, H. ; Takahagi, T.

Pub. info.:	Materials reliability in microelectronics VII : symposium held April 8-12, 1997, San Francisco, California, U.S.A.. pp.229-, 1997. Pittsburgh, Pa.. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	473

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Conference Proceedings

10. Aluminum nanodot array formed by anodic oxidation and its conduction properties (Invited Paper)

Shingubara, S. ; Murakami, Y. ; Sakaue, H. ; Takahagi, T.

Pub. info.:	Quantum Sensing: Evolution and Revolution from Past to Future. pp.387-395, 2003. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4999

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