1.

Conference Proceedings

Conference Proceedings
Lim, C.-M. ; Song, J.-H. ; Woo, S.-S. ; Kwon, K.-S. ; Ahn, C.-N. ; Shin, K.-S.
Pub. info.: Optical Microlithography XV.  Part Two  pp.1412-1420,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4691
2.

Conference Proceedings

Conference Proceedings
Kim, S.-K. ; Bok, C.-K. ; Shin, K.-S.
Pub. info.: Optical Microlithography XV.  Part Two  pp.1504-1512,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4691
3.

Conference Proceedings

Conference Proceedings
Oh, S.-Y. ; Kim, W.-H. ; Yune, H.-S. ; Kim, H.-B. ; Kim, S.-M. ; Ahn, C.-N. ; Shin, K.-S.
Pub. info.: Optical Microlithography XV.  Part Two  pp.1537-1543,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4691
4.

Conference Proceedings

Conference Proceedings
Park, J.H. ; Seo, D.C. ; Kim, C.-M. ; Lim, Y.-T. ; Cho, S.-D. ; Lee, J.B. ; Joo,H.-S. ; Jeon, H.-P. ; Kim, S.-J. ; Jung, J.-C. ; Shin, K.-S. ; Kong, K.K. ; Yamada, T.
Pub. info.: Advances in Resist Technology and Processing XIX.  Part One  pp.120-126,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4690
5.

Conference Proceedings

Conference Proceedings
Lee, G. ; Kong, K.-K. ; Jung, J.-C. ; Shin, K.-S. ; Kang, J.-H. ; Kim, S.D. ; Choi, Y.-J. ; Choi, S.-J. ; Kim, D.-B. ; Kim, J.-H.
Pub. info.: Advances in Resist Technology and Processing XIX.  Part One  pp.136-140,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4690
6.

Conference Proceedings

Conference Proceedings
You, T.-J. ; Bok, C.-K. ; Shin, K.-S.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XVI.  Part Two  pp.724-732,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4689
7.

Conference Proceedings

Conference Proceedings
Jung, J.-C. ; Kong, K.-K. ; Hwang, Y.-S. ; Park, K.-D. ; Lee, S.-K. ; Lee, G.S. ; Kim, J.S. ; Shin, K.-S.
Pub. info.: Advances in Resist Technology and Processing XIX.  Part One  pp.212-220,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4690
8.

Conference Proceedings

Conference Proceedings
Kudo, T. ; Alemy, E.L. ; Dammel, R.R. ; Kim, W.-K. ; Lee, S.-H. ; Masuda, S. ; McKenzie, D.S. ; Rahman, M.D. ; Romano, A.R. ; Padmanaban, M. ; Chun, J.-S. ; Jung, J.-C. ; Lee, S.-K. ; Shin, K.-S. ; Kim, H.-S.
Pub. info.: Advances in Resist Technology and Processing XIX.  Part One  pp.150-159,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4690
9.

Conference Proceedings

Conference Proceedings
Kim, H.-B. ; Ma, W.-K. ; Ahn, C.-N. ; Shin, K.-S.
Pub. info.: Optical Microlithography XV.  Part Two  pp.1278-1286,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4691
10.

Conference Proceedings

Conference Proceedings
Bok, C.K. ; Kim, S.-K. ; Kim, H.-B. ; Oh, J.-S. ; Ahn, C.-N. ; Shin, K.-S.
Pub. info.: Optical Microlithography XV.  Part Two  pp.810-821,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4691