1.

Conference Proceedings
Conference Proceedings
1. Effect of photoacid generators on the formation of residues in an organic BARC process
Shimomura, K. ; Okuda, Y. ; Okazaki, H. ; Kinoshita, Y. ; Pawlowski, G.
Pub. info.: Microlithography 1999 : advances in resist technology and processing XVI : 15-17 March 1999, Santa Clara, California.  pp.380-387,  1999.  Bellingham, Wash., USA.  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3678
2.

Conference Proceedings
Conference Proceedings
2. SOI Device Technology for low-power logic and DRAM LSIs
Maegawa, S. ; Ipposhi, T. ; Yamaguchi, Y. ; Iwamatsu, T. ; Maeda, S. ; Oashi, T. ; Ueda, K. ; Shimomura, K. ; Nishimura, T.
Pub. info.: Proceedings of the Eighth International Symposium on Silicon-on-Insulator Technology and Devices.  pp.352-358,  1997.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 97-23
3.

Conference Proceedings
Conference Proceedings
3. 4-μm pixel CMOS image sensor with low-image lag and high-temperature operability
Endo, Y. ; Nitta, Y. ; Kubo, H. ; Murao, T. ; Shimomura, K. ; Kimura, M. ; Watanabe, K. ; Yamamoto, S. ; Komori, S.
Pub. info.: Sensors and camera systems for scientific, industrial, and digital photography applications IV : 21-23 January, 2003, Santa Clara, California, USA.  pp.196-204,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5017
4.

Conference Proceedings
Conference Proceedings
4. Deposition and characterization of ultrathin Ta2O5 layers deposited on silicon from a Ta(OC2H5)5 precursor
Chaneliere, C. ; Autran, J. L. ; Raynard, J. P. ; Michailos, M. ; Barla, K. ; Ushikawa, H. ; Hiroe, A. ; Shimomura, K. ; Kakimoto, A.
Pub. info.: Structure and electronic properties of ultrathin dielectric films on silicon and related structures : symposium held November 29-December 1, 1999, Boston, Massachusetts, U.S.A..  pp.75-,  2000.  Warrendale, PA.  MRS-Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 592
5.

Technical Paper
Technical Paper
5. Development of a cobalt base superalloy for heavy duty gas turbine nozzles
Sato, M. ; Kobayashi, Y. ; Matsuzaki, H. ; Shimomura, K. ; Shibata, T. ; Nakamura, S. ; Fukui, Y. ; Wada, K.
Pub. info.: A.S.M.E. paper.  1996.  New York.  The American Society of Mechanical Engineers
Title of ser.: ASME Technical Paper : GT
Ser. no.: 1996
6.

Technical Paper
Technical Paper
6. Processing of a single crystal casting for heavy-duty gas turbine blades: Creep and metal/mould reaction behavior of Al2O3-SiO2 Shell mould
Iijima, K. ; Yoshinari, A. ; Ishida, T. ; Yasuda, T. ; Matsuzaki, H. ; Shimomura, K.
Pub. info.: A.S.M.E. paper.  1993.  New York, NY.  The American Society of Mechanical Engineers
Title of ser.: ASME Technical Paper : GT
Ser. no.: 1993
7.

Technical Paper
Technical Paper
7. Study on the turbine vane and blade for a 1500｡?C class industrial gas turbine
Amagasa, S. ; Shimomura, K. ; Kadowaki, M. ; Aoki, S. ; Aoyama, K. ; Takeishi, K. ; Kawai, H.
Pub. info.: A.S.M.E. paper.  1993.  New York, NY.  The American Society of Mechanical Engineers
Title of ser.: ASME Technical Paper : GT
Ser. no.: 1993
8.

Technical Paper
Technical Paper
8. Development of advanced gas turbine
Matsuzaki, H. ; Suto, Y. ; Kanazawa, Y. ; Sato, M. ; Kobayashi, Y. ; Shimomura, K.
Pub. info.: A.S.M.E. paper.  1996.  New York.  The American Society of Mechanical Engineers
Title of ser.: ASME Technical Paper : GT
Ser. no.: 1996
9.

Conference Proceedings
Conference Proceedings
9. Proposal of arrayed waveguides optical deflector and wavelegth divide optical switch
Kawakita, Y. ; Kihara, T. ; Miki, K. ; Shimomura, K.
Pub. info.: Integrated Optics: Devices, Materials, and Technologies VI.  pp.289-297,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4640