1.

Conference Proceedings
Conference Proceedings
1. Novel Reducing Chemistry for Supercritical Fluid Deposition of Copper
Momose, Takeshi ; Ohkubo, Tomohiro ; Sugiyama, Masakazu ; Shimogaki, Yukihiro
Pub. info.: Materials, technology and reliability of low-k dielectrics and copper interconnects : symposium held April 18-21, 2006, San Francisco, California, U.S.A..  pp.179-184,  2006.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 914
2.

Conference Proceedings
Conference Proceedings
2. Thin and Smooth Cu Seed Layer Deposition Using the Reduction of Low Temperature Deposited Cu2O
Kim, Hoon ; Kojima, Yasuhiko ; Sato, Hiroshi ; Yoshii, Naoki ; Hosaka, Shigetoshi ; Shimogaki, Yukihiro
Pub. info.: Materials, technology and reliability of low-k dielectrics and copper interconnects : symposium held April 18-21, 2006, San Francisco, California, U.S.A..  pp.167-172,  2006.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 914
3.

Conference Proceedings
Conference Proceedings
3. The Best Way to Obtain Good Quality CVD-TiN Films From TiCl4 and NH3
Hamamura, Hirotaka ; Shimogaki, Yukihiro ; Akiyama, Yasunobu ; Egashira, Yasuyuki ; Komiyama, Hiroshi
Pub. info.: Advanced interconnects and contact materials and processes for future integrated circuits : symposium held April 13-16, 1998, San Francisco, California, U.S.A..  pp.501-,  1998.  Warrendale, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 514
4.

Conference Proceedings
Conference Proceedings
4. Precise Control of CVD-ZrO2 Film Properties Based on Kinetic Information
Kawamoto, Takashi ; Shimogaki, Yukihiro
Pub. info.: Surface engineering 2001 - fundamentals and applications : symposium held November 26-29, 2001, Boston, Massachusetts, U.S.A..  pp.195-200,  2002.  Warrendale, Penn.  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 697
5.

Conference Proceedings
Conference Proceedings
5. Phenomenological and Elementary Reaction Analysis of Poly-crystalline Silicon CVD Process
Shimizu, Ryosuke ; Januma, Tadashi ; Ogino, Masaaki ; Sugiyama, Masakazu ; Koshi, Mitsuo ; Shimogaki, Yukihiro
Pub. info.: Silicon materials - processing characterization and reliability : symposium held April 1-5, 2002, San Francisco, California, U.S.A..  pp.501-506,  2002.  Warrendale.  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 716