1.

Conference Proceedings
Conference Proceedings
1. Proximity effect correction for reticle fabrication
Kamikubo,T. ; Abe,T. ; Oogi,S. ; Anze,H. ; Shimizu,M. ; Itoh,M. ; Nakasugi.T. ; Iijima,T. ; Hattori,Y.
Pub. info.: Photomask and X-ray mask technology IV : 17-18 April, 1997, Kawasaki, Japan.  pp.173-177,  1997.  Bellingham, Washington.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3096
2.

Technical Paper
Technical Paper
2. 1 MW Battery Energy Storage System Test Plant-Completion and System Test Operation
Shimizu,M. ; Nonoguchi,M. ; Kuniyoshi,M. ; Ieda,Y. ; Hiramatsu,T. ; Kondo,S.
Pub. info.: 22nd Intersociety Energy Conversion Engineering Conference : energy - new frontiers : Philadelphia, Pennsylvania, August 10-14, 1987.  pp.1241-1252,  1987.  "Society of Automotive Engineering, Inc."
Title of ser.: SAE publication
Ser. no.: P-198
3.

Conference Proceedings
Conference Proceedings
3. Optoelectronic fuzzy interface architecture using beam-steering vertical-cavity surface-emitting laser diodes
Itoh,H. ; Shimizu,M. ; Ogura,M. ; Mukai,S. ; Watanabe,M.
Pub. info.: Optics in Computing '98.  pp.70-73,  1998.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3490
4.

Conference Proceedings
Conference Proceedings
4. "193-nm single-layer resist materials: total consideration of design, physical properties, and lithographic performances on all major alicyclic platform chemistries"
Kajita,T. ; Nishimura,Y. ; Yamamoto,M. ; Ishii,H. ; Soyano,A. ; Kataoka,A. ; Slezak,M. ; Shimizu,M. ; Varanasi,P.R. ; Jordhamo,G. ; Lawson,M.C. ; Chen,R. ; Brunsvold,W.R. ; Li,W. ; Allen,R.D. ; Ito,H. ; Truong,H.D. ; Wallow,T.I.
Pub. info.: Advances in Resist Technology and Processing XVIII.  4345  pp.712-724,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4345
5.

Conference Proceedings
Conference Proceedings
5. Fluoride optical fiber amplifiers
Fujiura,K. ; Kanamori,T. ; Yamada,M. ; Shimizu,M. ; Nishida,Y. ; Ohishi,Y. ; Sudo,S.
Pub. info.: Rare-Earth-Doped Devices.  pp.174-185,  1997.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2996
6.

Conference Proceedings
Conference Proceedings
6. Stage tracking of a mask-scan EB mask writer test stand
Nishimura,S. ; Mitsui,S. ; Ogasawara,M. ; Akeno,K. ; Shimizu,M. ; Kusakabe,H. ; Wada,H. ; Hattori,K. ; Yoshitake,S. ; Simomura,N. ; Takamatsu,J. ; Sunaoshi,H. ; Fukudome,Y. ; Tojo,T. ; Tsuchiya,S.
Pub. info.: 21st Annual BACUS Symposium on Photomask Technology.  4562  pp.503-510,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4562