1.

Conference Proceedings
Conference Proceedings
1. *RAPID THERMAL PROCESSING:FOR SELF-ALIGNED SILICIDE TECHNOLOGY
Ku, Y. H. ; Lee, S. K. ; Louis, E., ; Shih, D. K. ; Kwong, D. L.
Pub. info.: Rapid thermal processing of electronic materials : symposium held April 21-23, 1987, Anaheim California, U.S.A..  pp.155-164,  1987.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 92
2.

Conference Proceedings
Conference Proceedings
2. RAPID THERMAL NITRADATION OF THIN OXIDES
Shih, D. K. ; Lee, S. K. ; Kwong, D. L ; Lee, S.
Pub. info.: Rapid thermal processing of electronic materials : symposium held April 21-23, 1987, Anaheim California, U.S.A..  pp.121-126,  1987.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 92