1.

Conference Proceedings

Conference Proceedings
von Ammon, W. ; Shigematsu, T.
Pub. info.: Semiconductor silicon 2002 : proceedings of the ninth International Symposium on Silicon Materials Science and Technology.  pp.209-211,  2002.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2002-2
2.

Conference Proceedings

Conference Proceedings
von Ammon, W. ; Shigematsu, T.
Pub. info.: Semiconductor silicon 2002 : proceedings of the ninth International Symposium on Silicon Materials Science and Technology.  pp.147-148,  2002.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2002-2
3.

Conference Proceedings

Conference Proceedings
von Ammon, W. ; Shigematsu, T.
Pub. info.: Semiconductor silicon 2002 : proceedings of the ninth International Symposium on Silicon Materials Science and Technology.  pp.209-211,  2002.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2002-2
4.

Conference Proceedings

Conference Proceedings
von Ammon, W. ; Shigematsu, T.
Pub. info.: Semiconductor silicon 2002 : proceedings of the ninth International Symposium on Silicon Materials Science and Technology.  pp.147-148,  2002.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2002-2
5.

Conference Proceedings

Conference Proceedings
Yanase, Y. ; Horie, H. ; Oka, Y. ; Sano, M. ; Sumita, S. ; Shigematsu, T.
Pub. info.: Proceedings of the Third International Symposium on Cleaning Technology in Semiconductor Device Manufacturing.  pp.546-553,  1994.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1994-7
6.

Conference Proceedings

Conference Proceedings
Sano, M. ; Hourai, M. ; Sumita, S. ; Shigematsu, T.
Pub. info.: Proceedings of the Satellite Symposium to ESSDERC 93 Grenoble/France : crystalline defects and contamination: their impact and control in device manufacturing.  pp.3-15,  1993.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1993-15
7.

Conference Proceedings

Conference Proceedings
Sano, M. ; Sumita, S. ; Shigematsu, T. ; Fujino, N.
Pub. info.: Proceedings of the Seventh International Symposium on Silicon Materials Science and Technology.  pp.784-795,  1994.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1994-10
8.

Conference Proceedings

Conference Proceedings
Hourai, M. ; Nagashima, T. ; Kajita, E. ; Miki, S. ; Sumita, S. ; Sano, M. ; Shigematsu, T.
Pub. info.: Proceedings of the Seventh International Symposium on Silicon Materials Science and Technology.  pp.156-167,  1994.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1994-10
9.

Conference Proceedings

Conference Proceedings
Marsden, K. ; Sadamitsu, S. ; Hourai, M. ; Sumita, S. ; Shigematsu, T.
Pub. info.: Proceedings of the Seventh International Symposium on Silicon Materials Science and Technology.  pp.684-694,  1994.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1994-10
10.

Conference Proceedings

Conference Proceedings
Adachi, N. ; Nishikawa, H. ; Komatsu, Y. ; Hourai, H. ; Sano, M ; Shigematsu, T.
Pub. info.: Defect engineering in semiconductor growth, processing and device technology : symposium held April 26-May 1, 1992, San Francisco, California, U.S.A..  pp.815-822,  1992.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 262