1.

Conference Proceedings
Conference Proceedings
1. Heme-Hydrogen Peroxide Complexes Formation as Studied by ESR and Optical Spectroscopy
Tajima, K. ; Shigematsu, M. ; Jinno, J. ; Ishizu, K. ; Ohya-Nishiguchi, H.
Pub. info.: Dioxygen activation and homogeneous catalytic oxidation : proceedings of the Fourth International Symposium on Dioxygen Activation and Homogeneous Catalytic Oxidation.  pp.305-,  1991.  Amsterdam.  Elsevier
Title of ser.: Studies in surface science and catalysis
Ser. no.: 66
2.

Conference Proceedings
Conference Proceedings
2. A new monocyclic fluoropolymer for 157-nm and 193-nm photoresists
Houlihan, F. ; Sakamuri, R. ; Hamilton, K. ; Dimerli, A. ; Rentkiewicz, D. ; Romano, A. ; Dammel, R. R. ; Wei, Y. ; Stepanenko, N. ; Sebald, M. ; Hohle, C. ; Conley, W. ; Miller, D. ; Itani, T. ; Shigematsu, M. ; Kawaguchi, E.
Pub. info.: Advances in resist technology and processing XXII : 28 February-2 March, 2005, San Jose, California, USA.  pp.554-563,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5753(1)
3.

Conference Proceedings
Conference Proceedings
3. Recent advances in fluorinated resists for application at 157 nm
Houlihan, F.M. ; Sakamuri, R. ; Romano, A. ; Rentkiewicz, D. ; Dammel, R.R. ; Conley, W.E. ; Miller, D.A. ; Sebald, M. ; Stepanenko, N. ; Markert, M. ; Mierau, U. ; Vermeir, I. ; Hohle, C. ; Itani, T. ; Shigematsu, M. ; Kawaguchi, E.
Pub. info.: Advances in Resist Technology and Processing XXI.  pp.134-150,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5376
4.

Conference Proceedings
Conference Proceedings
4. Development of organic bottom antireflective coating for 157-nm lithography
Irie, S. ; Shigematsu, M. ; Miyoshi, S. ; Sakamoto, R. ; Mizusawa, K. ; Nakajima, Y. ; Itani, T.
Pub. info.: Optical Microlithography XVI.  Part Three  pp.1371-1377,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5040