1.

Conference Proceedings
Conference Proceedings
1. Laser-produced plasma (LPP) scale-up and commercialization
Moyer,R.H. ; Shields,H. ; Martos,A. ; Fornaca,S.W. ; Pierre,R.J.St. ; Petach,M.B.
Pub. info.: Emerging lithographic technologies V : 27 February-1 March, 2001, Santa Clara, [California], USA.  pp.249-254,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4343
2.

Conference Proceedings
Conference Proceedings
2. High-power source and illumination system for extreme ultraviolet lithography
Kubiak,G.D. ; Bernardez,L.J. ; Krenz,K D. ; Replogle,W.C. ; Sweatt,W.C. ; Sweeney,D.W. ; Hudyma,R.M. ; Shields,H.
Pub. info.: EUV, x-ray, and neutron optics and sources : 21-23 July 1999, Denver, Colorado.  pp.136-142,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3767
3.

Conference Proceedings
Conference Proceedings
3. EUV absorption in a laser-produced plasma source
Kanouff,M.P. ; Shields,H. ; Bernardez,L.J. ; Kubiak,G.D.
Pub. info.: Emerging lithographic technologies V : 27 February-1 March, 2001, Santa Clara, [California], USA.  pp.507-514,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4343
4.

Conference Proceedings
Conference Proceedings
4. Dielectric and Electron Paramagnetic Double Resonance
Charnock,F. ; Shields,H. ; Matthews,G.E.
Pub. info.: Proceedings of the 13th International Conference on Defects in Insulating Materials, ICDIM 96, July 15-19, 1996, Wake Forest University, Winston-Salem, NC 27109, USA.  pp.353-356,  1997.  Zurich, Switzerland.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 239-241
5.

Conference Proceedings
Conference Proceedings
5. High-average-power picosecond-pulse excimer laser system for x-ray generation
Powers,M.F. ; Shields,H.
Pub. info.: Excimer lasers, optics, and applications : 12-13 February 1997, San Jose, California.  pp.45-50,  1997.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2992