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21 results

Conference Proceedings

1. Practical Roadmap and Approach for Multi-level Interconnect Technology for Realizing Over-GHz System-on-Chip*

Shibata, H.

Pub. info.:	ULSI Process Integration : proceedings of the International Symposium. pp.402-409, 2001. Pennington, N.J.. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	2001-2

Conference Proceedings

2. Plasma Induced Damage Reduction by Spin-on Low-k Dielectric Process

Matsunaga, N. ; Yoshinari, H. ; Yamada, N. ; Shibata, H.

Pub. info.:	ULSI Process Integration : proceedings of the International Symposium. pp.380-388, 2001. Pennington, N.J.. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	2001-2

Conference Proceedings

3. Surface-Separated Collection of Ionic Species for Ion-Chromatography Analysis on Silicon Wafers

Yanagi, K. ; Shibata, H. ; Nagai, K. ; Watanabe, M.

Pub. info.:	High Purity Silicon VI : proceedings of the sixth International Symposium. pp.561-572, 2000. Bellingham, Wash.. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	2000-17

Conference Proceedings

4. ELECTRICAL AND PHOTOLUMINESCENCE PROPERTIES OF Mg+ AND C+ IMPLANTED ACCEPTORS IN InP

Beye, A.C. ; Yamada, A. ; Shimizu, A. ; Shibata, H. ; Tanoue, H. ; Mayer, K.M. ; Sugiyama, H. ; Kamijoh, K. ; Oda, T. ; Arriga, O. ; Akiyama, I. ; Kutsuwada, N. ; Matsumori, T. ; Uekusa, S. ; Makita, Y.

Pub. info.:	Impurities, defects, and diffusion in semiconductors : bulk and layered structures : symposium held November 27-December 1, 1989, Boston, Massachusetts, U.S.A.. pp.139-144, 1990. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	163

Conference Proceedings

5. ELECTRICAL PROPERTIES OF HEAVILY Be-DOED GaAs GROWN BY MOLECULAR BEAM EPITAXY

Shibata, H. ; Makita, Y. ; Yamada, A. ; Ohnishi, N. ; Mori, M. ; Nakayama, Y. ; Beye, A.C. ; Mayer, K.M. ; Takahashi, T. ; Sugiyama, Y. ; Tacano, M. ; Ishituka, K. ; Matsumori, T.

Pub. info.:	Impurities, defects, and diffusion in semiconductors : bulk and layered structures : symposium held November 27-December 1, 1989, Boston, Massachusetts, U.S.A.. pp.121-126, 1990. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	163

Conference Proceedings

6. FORMATION OF THREE RED-SHIFT EMISSIONS IN HEAVILY GERMANIUM-DOPED P-TYPE GaAs GROWN BY MBE

Makita, Y. ; Yamada, A. ; Shibata, H. ; Asakura, H. ; Ohnishi, N. ; Beye, A.C. ; Mayer, K.M. ; Kutsuwada, N.

Pub. info.:	Impurities, defects, and diffusion in semiconductors : bulk and layered structures : symposium held November 27-December 1, 1989, Boston, Massachusetts, U.S.A.. pp.115-120, 1990. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	163

Conference Proceedings

7. Development of dual-LED fiber optic surface plasmon sensor for liquid refractive index detection 16377-18]

Shibata, H. ; Suzuki, H. ; Sugimoto, M. ; Matsui, Y. ; Kondoh, J.

Pub. info.:	Advanced environmental, chemical, and biological sensing technologies IV : 1-3 October 2006, Boston, Massachusetts, USA. pp.63770G-, 2006. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	6377

Conference Proceedings

8. Growth of Ge1-xCx Alloys on Si by Combined Low-Energy Ion-Beam and Molecular-Beam-Epitaxy Method

Shibata, H. ; Kimura, S. ; Fons, P. ; Yamada, A. ; Makita, Y. ; Obara, A. ; Kobayashi, N. ; Takahashi, H. ; Katsumata, H. ; Tanabe, J. ; Uekusa, S.

Pub. info.:	Materials modification and synthesis by ion beam processing : symposium held December 2-5, 1996, Boston, Massachusetts, U.S.A.. pp.393-, 1997. Pittsburgh, Pa.. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	438

Conference Proceedings

9. Radiation-Induced Reactions of Onium Salts in Novolak

Kozawa, Takahiro ; Uesaka, M. ; Watanabe, Takeo ; Yamashita, Yoshio ; Shibata, H. ; Yoshida, Yoichi ; Tagawa, Seiichi

Pub. info.:	Polymeric materials for microelectronic applications : science and technology. pp.121-, 1994. Washington, DC. American Chemical Society
Title of ser.:	ACS symposium series
Ser. no.:	579

10.

Conference Proceedings

10. Ion-Beam-Induced Epitaxy and Solid Phase Epitaxy of SiGeC on Si Formed by Ge and C Ion Implantation and Their Structural and Optical Properties

Kobayashi, N. ; Katsumata, H. ; Makita, Y. ; Hasegawa, M. ; Hayashi, N. ; Shibata, H. ; Uekusa, S. ; Hishita, S.

Pub. info.:	Film synthesis and growth using energetic beams : symposium held April 17-20, 1995, San Francisco, California, U.S.A.. pp.189-, 1995. Pittsburgh, PA. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	388

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