1.

Conference Proceedings
Conference Proceedings
1. Characterization of ion-implanted SiO2 properties applicable to laser processing
Teng, T.C. ; Shiau, Y. ; Chen, Y.S. ; Skinner, C. ; Peng, J.D. ; Palkuti, L.J.
Pub. info.: Laser and electron-beam solid interactions and materials processing : proceedings of the Materials Research Society Annual Meeting, November 1980, Copley Plaza Hotel, Boston, Massachusetts, U.S.A..  pp.391-398,  1981.  New York.  North Holland
Title of ser.: Materials Research Society symposia proceedings
Ser. no.: 1
2.

Conference Proceedings
Conference Proceedings
2. Analysis of Within-Run Process Variations Using Automated Wafer-Position Tracking in Workstream
Ling, Z.-M. ; Pak, J. ; Beckage, P. ; Lin, Y.-T. ; Kittler, R. ; Shiau, Y.
Pub. info.: ULSI science and technology, 1995 : proceedings of the Fifth International Symposium on Ultra Large Scale Integration Science and Technology.  pp.418-423,  1995.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 95-5