1.

Conference Proceedings
Conference Proceedings
1. Fabrication of piezoresistive-sensed AFM cantilever probe with integrated tip
Rangelow,I.W. ; Shi,F. ; Hudek,P. ; Gotszalk,T. ; Grabiec,P.B. ; Dumania,P.
Pub. info.: Micromachining and microfabrication process technology II : 14-15 October, 1996, Austin, Texas.  pp.56-64,  1996.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2879
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Conference Proceedings
Conference Proceedings
2. Horizontal adaptive optics research at Yerkes Observatory
Wild,W.J. ; Kibblewhite,E.J. ; Le Bigot,E.-O. ; Shi,F.
Pub. info.: Airborne laser advanced technology : 13-14 April 1998, Orlando, Florida.  pp.57-65,  1998.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3381
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Conference Proceedings
Conference Proceedings
3. Initial test results from the Next Generation Space Telescope(NGST)wavefront sensing and control testbed(WCT)
Bowers,C.W. ; Davila,P.S. ; Dean,B.H. ; Perkins,B.D. ; Wilson,M.E. ; Redding,D.C. ; Basinger,S.A. ; Cohen,D. ; Lowman,A.E. ; Shi,F. ; Burns,L.A. ; Fitzmaurice,M.W. ; Norton,T.A. ; Petrone,P.
Pub. info.: UV, optical, and IR space telescopes and instruments : 29-31 March 2000, Munich, Germany.  pp.763-773,  2000.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4013
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Conference Proceedings
Conference Proceedings
4. DCATT dispersed fringe sensor:modeling and experimenting with the transmissive phase plates
Shi,F. ; Redding,D.C. ; Bowers,C.W. ; Lowman,A.E. ; Basinger,S.A. ; Norton,T.A. ; Petrone,P. ; Davila,P.S. ; Wilson,M.E. ; Boucarut,R.
Pub. info.: UV, optical, and IR space telescopes and instruments : 29-31 March 2000, Munich, Germany.  pp.757-762,  2000.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4013
5.

Conference Proceedings
Conference Proceedings
5. Telescope simulator for the Nexus wavefront control testbed
Lowman,A.E. ; Shi,F. ; Redding,D.C. ; Basinger,S.A. ; Bowers,C.W. ; Davila,P.S.
Pub. info.: UV, optical, and IR space telescopes and instruments : 29-31 March 2000, Munich, Germany.  pp.954-961,  2000.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4013
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Conference Proceedings
Conference Proceedings
6. Palomar adaptive optics project:status and performance
Troy,M. ; Dekany,R.G. ; Brack,G. ; Oppenheimer,B.R. ; Bloemhof,E.E. ; Trinh,T. ; Dekens,F.G. ; Shi,F. ; Hayward,T.L. ; Brandl,B.
Pub. info.: Adaptive optical systems technology : 29-31 March, 2000, Munich, Germany.  Part1  pp.31-40,  2000.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4007
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Conference Proceedings
Conference Proceedings
7. PN and SOI wafer flow process for stencil mask fabrication
Butschke,J. ; Ehrmann,A. ; Haugeneder,E. ; Irmscher,M. ; Kasmaier,R. ; Kragler,K. ; Letzkus,F. ; Loschner,H. ; Mathuni,J. ; Rangelow,I.W. ; Reuter,C. ; Shi,F. ; Springer,R.
Pub. info.: 15th European Conference on Mask Technology for Integrated Circuits and Microcomponents '98 : 16-17 November 1998, Munich-Unterhaching, Germany.  pp.20-29,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3665
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Conference Proceedings
Conference Proceedings
8. Embedded Tantalum Pentoxide Thin Film Capacitors for use in Power Electronic Applications
Nielsen,J.A. ; Chien,C.P. ; Shi,F.
Pub. info.: 2000 International Conference on High-Density Interconnect and Systems Packaging, 25-28 April 2000, The Adam's Mark Hotel, Denver, Colorado, USA.  pp.346-350,  2000.  Reston, VA, Bellingham, Wash..  IMAPS — SPIE-The International Society for Optical
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4217
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Conference Proceedings
Conference Proceedings
9. Solar system science with subarcsecond slit spectroscopy
Dekany,R.G. ; Banfield,D.J. ; Oppenheimer,B.R. ; Bouchez,A. ; Brown,M.E. ; Hayward,T.L. ; Brandl,B. ; Troy,M. ; Brack,G. ; Trinh,T. ; Shi,F.
Pub. info.: Adaptive optical systems technology : 29-31 March, 2000, Munich, Germany.  Part2  pp.811-815,  2000.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4007
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Conference Proceedings
Conference Proceedings
10. Stress engineering of SOI silicon stencil masks by boron doping concentration
Degen,A. ; Voigt,J. ; Kratzenberg,M. ; Shi,F. ; Butschke,J. ; Loschner,H. ; Kaesmaier,R. ; Ehrmann,A. ; Rangelow,I.W.
Pub. info.: Emerging lithographic technologies IV : 28 February-1 March 2000, Santa Clara, USA.  pp.395-404,  2000.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3997