1.

Conference Proceedings
Conference Proceedings
1. Infrastructure suitedfor supporting a fleet of wireless miniature robots designed for atomic-scale operations
Martel, S.M. ; Koker, T. ; Riebel, S. ; Sherwood, M. ; Suurkivi, J. ; Hunter, I.W.
Pub. info.: Microrobotics and microassembly III : 29-30 October 2001 Newton.  pp.221-230,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4568
2.

Conference Proceedings
Conference Proceedings
2. General description of the wireless miniatura NanoMalker robot designed for atomic-scale operations
Martel, S.M. ; Cervera Olague, L. ; Bautista Coves Ferrando, J. ; Suurkivi, J. ; Fofonoff, T. ; Sherwood, M. ; Dyer, R. ; Hunter, I.W.
Pub. info.: Microrobotics and microassembly III : 29-30 October 2001 Newton.  pp.231-240,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4568
3.

Conference Proceedings
Conference Proceedings
3. NMR analysis of chemically amplified resist films
Ito, H. ; Sherwood, M.
Pub. info.: Microlithography 1999 : advances in resist technology and processing XVI : 15-17 March 1999, Santa Clara, California.  pp.104-115,  1999.  Bellingham, Wash., USA.  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3678
4.

Conference Proceedings
Conference Proceedings
4. Isolation and Structure of Sc2@C74 and 5c2@C76
Dorn, H.C. ; Stevenson, S. ; Burbank, P. ; Harich, K. ; Sun, Z. ; Glass, T. ; Anderson, M. ; Bethune, D.S. ; Sherwood, M.
Pub. info.: Proceedings of the Symposium on Recent Advances in the Chemistry and Physics of Fullerenes and Related Materials.  pp.990-1002,  1998.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 98-8
5.

Conference Proceedings
Conference Proceedings
5. Toughened, Inorganic-Organic Hybrid Materials for Microelectronic Application
Hedrick, J. L. ; Srinivasan, S. ; Cha, H-J. ; Yoon, D. ; Flores, V. ; Harbison, M. ; Pietro, R. Di ; Hinsberg, W. ; Deline, V. ; Brown, H. R. ; Sherwood, M. ; Paulson, E. ; Miller, R. D. ; Cook, R. ; Liniger, E. ; Simonyi, E. ; Klaus, D. ; Cohen, S. ; Hummel, J.
Pub. info.: Low-dielectric constant materials II : symposium held December 2-3, 1996, Boston, Massachusetts, U.S.A..  pp.47-,  1997.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 443
6.

Conference Proceedings
Conference Proceedings
6. Porous Organosilicates for On-Chip Dielectric Applications
Beyers, R. ; Carter, K. R. ; Cook, R. F. ; Harbison, M. ; Hawker, C. J. ; Hedrick, J. L. ; Lee, V. ; Lintger, E. ; Miller, R. D. ; Nguyen, C. ; Remenar, J. ; Sherwood, M. ; Trollsas, M. ; Volksen, W. ; Yoon, D. Y.
Pub. info.: Low-dielectric constant materials V : symposium held April 5-8, 1999, San Francisco, California, U.S.A..  pp.3-16,  1999.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 565