1.

Conference Proceedings
Conference Proceedings
1. Thin-cavity interferometric sensors for detection of weak radiation flux and microvibrations
Whelan,M.P. ; Kenny,R.P. ; Sheridan,J.T. ; Coutsomitros,C.Th.
Pub. info.: Optical Inspection and Micromeasurements.  pp.745-756,  1996.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2782
2.

Conference Proceedings
Conference Proceedings
2. Rigorous electromagnetic analysis of aerial image formation in photoresist
Babin,S.V. ; Sheridan,J.T.
Pub. info.: Optical Microlithography IX.  Part1  pp.299-310,  1996.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2726