1.

Conference Proceedings
Conference Proceedings
1. LIGA-fabricated two-dimensional quadrupole array and scroll pump for miniature gas chromatograph/mass spectrometer
Wiberg, D.V. ; Myung, N.V. ; Eyre, B. ; Shcheglov, K. ; Orient, O.J. ; Moore, E. ; Munz, P.
Pub. info.: First jet propulsion laboratory in Situ Instruments Workshop : 11-13 june 2002, Pasadena, California, USA.  pp.8-13,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4878
2.

Conference Proceedings
Conference Proceedings
2. High-performance MEMS microgyroscope
Bae, S.Y. ; Hayworth, K.J. ; Yee, K.Y. ; Shcheglov, K. ; Wiberg, D.V.
Pub. info.: Design, test, integration, and packaging of MEMS/MOEMS 2002 : 6-8 May, 2002, Cannes, France.  pp.316-324,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4755
3.

Conference Proceedings
Conference Proceedings
3. Piezoelectric unimorph deformable mirror concept by wafer transfer for ultralarge space telescopes
Yang, E.-H. ; Shcheglov, K.
Pub. info.: Adaptive Optical System Technologies II.  Part Two  pp.703-710,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4839
4.

Conference Proceedings
Conference Proceedings
4. Concept, modeling, and fabrication techniques for large-stroke piezoelectric unimorph deformable mirrors
Yang, E.-H. ; Shcheglov, K. ; Trolier-McKinstry, S.
Pub. info.: MOEMS Display and Imaging Systems.  pp.271-278,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4985
5.

Conference Proceedings
Conference Proceedings
5. Concept, modeling, and fabrication techniques for large-stroke piezoelectric unimorph deformable mirrors
Yang, E.-H. ; Shcheglov, K. ; Trolier-McKinstry, S.
Pub. info.: MOEMS and Miniaturized Systems III.  pp.326-333,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4983