1.

Conference Proceedings
Conference Proceedings
1. DIRECT SILICIDATION OF Co ON Si BY RAPID THERMAL ANNEALING
Tabasky, M. ; Bulat, E.S. ; Ditchek, B.M. ; Sullivan, M.A. ; Shatas, S.
Pub. info.: Rapid thermal processing : symposium held December 2-4, 1985, Boston, Massachusetts, U.S.A..  pp.271-278,  1985.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 52
2.

Conference Proceedings
Conference Proceedings
2. EFFECTS OF CARBON CONCENTRATION UPON OXYGEN PRECIPITATION IN CZ Si
Hahn, S. ; Arst, M. ; Ritz, K. N. ; Shatas, S. ; Stein, H. J. ; Rek, Z. U. ; Tiller, W. A.
Pub. info.: Defects in electronic materials : symposium held November 30-December 3, 1987, Boston, Massachusetts, U.S.A..  pp.201-204,  1988.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 104
3.

Conference Proceedings
Conference Proceedings
3. RAPID THERMAL ANNEALING OF Si-IMPLANTED GaAs
Rosenblatt, D. H. ; Hitchens, W. R. ; Shatas, S. ; Gat, A. ; Betts, D. A.
Pub. info.: Energy beam-solid interactions and transient thermal processing : symposium held November 1983 in Boston, Massachusetts, U.S.A..  pp.669-674,  1984.  New York.  North-Holland
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 23
4.

Conference Proceedings
Conference Proceedings
4. THERMAL DONOR REMOVAL BY RAPID THERMAL ANNEALING: INFRARED ABSORPTION
Stein, H. J. ; Hahn, S. K. ; Shatas, S.
Pub. info.: Microscopic identification of electronic defects in semiconductors : symposium held April 15-18, 1985, San Francisco, California, U.S.A..  pp.269-274,  1985.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 46