Impurities, defects, and diffusion in semiconductors : bulk and layered structures : symposium held November 27-December 1, 1989, Boston, Massachusetts, U.S.A.. pp.189-192, 1990. Pittsburgh, Pa.. Materials Research Society
Higgs III, C. Fred ; Ng, Sum Huan ; Yoon, Inho ; Shan, Lei ; Yap, Lipkong ; Danyluk, Steven
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Chemical-mechanical planarization : symposium held April 22-24, 2003, San Francisco, California, U.S.A.. pp.305-312, 2003. Warrendale, Pa.. Materials Research Society
Zhou, Chunhong ; Shan, Lei ; Ng, S.H. ; Hight, Robert ; Paszkowski, Andrew J. ; Danyluk, S.
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Chemical-mechanical polishing 2001 -- advances and future challenges : symposium held April 18-20, 2001, San Francisco, California, U.S.A.. 2001. Warrendale, PA. Materials Research Society