1.

Conference Proceedings
Conference Proceedings
1. Beam Characterization Techniques for ULSI
Shaffner, T.J.
Pub. info.: Proceedings of the Symposium on Diagnostic Techniques for Semiconductor Materials and Devices.  pp.295-312,  1994.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1994-33
2.

Conference Proceedings
Conference Proceedings
2. INTRODUCTORY REMARKS - - DIAGNOSTIC ANALYSIS
Shaffner, T.J. ; Kawado, S.
Pub. info.: Proceedings of the Seventh International Symposium on Silicon Materials Science and Technology.  pp.1067-1070,  1994.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1994-10
3.

Conference Proceedings
Conference Proceedings
3. OXYGEN STACKING FAULT PATTERNS IN CZ SILICON CRYSTAL GROWTH
Shaffner, T.J.
Pub. info.: Proceedings of the Third International Symposium on Process Physics and Modeling in Semiconductor Technology.  pp.271-292,  1993.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1993-6
4.

Conference Proceedings
Conference Proceedings
4. Characterization Challenges for the ULSI Era
Shaffner, T.J.
Pub. info.: Proceedings of the Electrochemical Society Symposium on Diagnostic Techniques for Semiconductor Materials and Devices.  pp.1-15,  1997.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 97-12