Dror, R. ; Feigel, A.I. ; Veinguer, M. ; Sfez, B.G. ; Klebanov, M. ; Arsh, A. ; Lyubin, V.
Pub. info.:
Micromachining technology for micro-optics and nano-optics III : 25-27 January 2005, San JOse, California, USA. pp.56-67, 2005. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering