1.

Conference Proceedings
Conference Proceedings
1. Model of Superfilling in Damascene Electroplating: Comparison of Experimental Feature Filling with Model Predictions
Deligianni, H. ; Horkans, J. ; Kwietniak, K. ; Dukovic, J.O. ; Andricacos, P.C. ; Boettcher, S. ; Seo, S.-C. ; Locke, P. ; Simon, A. ; Seymour, S. ; Malhotra, S.
Pub. info.: Electrochemical processing in ULSI fabrication III : proceedings of the international symposium.  pp.145-160,  2000.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2000-8
2.

Conference Proceedings
Conference Proceedings
2. A HIGH PERFORMANCE SUBMICROMETER CMOS/SOI TECHNOLOGY USING ULTRATHIN SILICON FILMS ON SIMOX
vasudev, P. K. ; Terrill, K. W. ; Seymour, S.
Pub. info.: Silicon-on-insulator and buried metals in semiconductors : symposium held November 30-December 3, 1987, Boston, Massachusetts, U.S.A..  pp.349-352,  1988.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 107