1.

Conference Proceedings
Conference Proceedings
1. Characteristics of an Inductively Coupled C12/Ar Plasma and its Application to Cu Etching
Seo, S-H. ; Kim, J-H. ; Lee, P-W. ; Chang, H-Y.
Pub. info.: Proceedings of the Symposium on Process control, Diagnostics, and Modeling in Semiconductor Manufacturing.  pp.327-338,  1995.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 95-2
2.

Conference Proceedings
Conference Proceedings
2. Production of High Density Plasma on the Substrate in a Helicon Source and application to the Deposition of SiOF Film with Low Dielectric Constant
Kim, J-H. ; Seo, S-H. ; Yun, S-M. ; Chang, H-Y. ; Choi, C-K. ; Lee, K-M.
Pub. info.: Proceedings of the Symposium on Process control, Diagnostics, and Modeling in Semiconductor Manufacturing.  pp.461-473,  1995.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 95-2
3.

Technical Paper
Technical Paper
3. Development of the Vibrational EFA (Energy Flow Analysis) Software EFADSC++ R4 and its Applications to Automobiles.
Hong, S-Y. ; Park, Y-H. ; Seo, S-H. ; Kil, H-G.
Pub. info.: 2005 SAE Noise and Vibration Conference and Exhibition : technical paper.  2005.  Warrendale, Penn..  Society of Automotive Engineers
Title of ser.: Society of Automotive Engineers technical paper series
Ser. no.: 2005