1.

Conference Proceedings
Conference Proceedings
1. Process Control Challenges and Solutions: TEOS, W, and Cu CMP
Angyal, M. ; Boeck, B. ; Cope, J. ; Dang, C. ; Grudowski, P. ; Islam, R. ; Kolagunta, V. ; Mendonca, J. ; Pettinato, C. ; Selinidis, S. ; Smith, B.
Pub. info.: Chemical mechanical polishing -- fundamentals and challenges : symposium held April 5-7, 1999, San Francisco, California, U.S.A..  pp.167-172,  2000.  Warrendale, PA.  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 566
2.

Conference Proceedings
Conference Proceedings
2. Integration Challenges of Inorganic Low-k (k ｡？2.5) Materials With Cu for Sub-0.25 ｦﾌm Multilevel Interconnects
Yu, K. C. ; Defilippi, J. ; Tiwari, R. ; Sparks, T. ; Smith, D. ; Olivares, M. ; Selinidis, S. ; Zhang, J. ; Junker, K. ; Braekelmann, G. ; Farkas, J. ; Lee, K. S. ; Filipiak, S. ; Lindell, M. ; Watanabe, J. K. ; Wetzel, J. T. ; Jawarani, D. ; Herrick, M. T. ; Cave, N. G. ; Hobbs, C. C.
Pub. info.: Advanced interconnects and contacts : symposium held April 5-7, 1999, San Francisco, California, U.S.A..  pp.499-,  1999.  Warrendale, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 564
3.

Conference Proceedings
Conference Proceedings
3. Integration Challenges of Inorganic Low-K (K < 2.5) Materials With Cu for Sub-0.25)μm Multilevel Interconnects
Blumenthal, R. ; Braekelmann, G. ; Cave, N. G. ; Conner, J. ; Crabtree, P. ; Defilippi, J. ; Denning, D. ; Farkas, J. ; Filipiak, S. ; Fowler, B. W. ; Fox, R. ; Freeman, M. ; Garcia, S. ; Herrick, M. T. ; Hershey, R. ; Hobbs, C. C. ; Jawarani, D. ; Junker, K. ; Keyes, C. ; Kirksey, S. ; Lee, J. J. ; Lee, K. S. ; Lindell, M. ; Mora, R. ; Neil, T. ; Nguyen, T. ; Olivares, M. ; Pena, T. Newton. D. ; Selinidis, S. ; Sieloff, D. D. ; Smith, D. ; Sparks, T. ; Stankus, JJ. ; Tiwari, R. ; VanGompel, T. ; Watanabe, J. K. ; Weitzman, E. J. ; Wetzel, J. T. ; Yu, K. C. ; Zhang, J.
Pub. info.: Low-dielectric constant materials V : symposium held April 5-8, 1999, San Francisco, California, U.S.A..  pp.151-160,  1999.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 565