Berry, I. ; Shiota, A. ; Han, Q. ; Waldfried, C. ; Sekiguchi, M. ; Escorcia, O.
Pub. info.:
Copper interconnects, new contact metallurgies, structures, and low-k interlevel dielectrics : proceedings of the internatioal symposium. pp.202-210, 2002. Pennington, N.J.. Electrochemical Society
Waldfired, C. ; Shiota, A. ; Sekiguchi, M. ; Escorcia, O. ; han, Q. ; BLerrv, I.L.
Pub. info.:
Copper interconnects, new contact metallurgies, structures, and low-k interlevel dielectrics : proceedings of the internatioal symposium. pp.187-193, 2002. Pennington, N.J.. Electrochemical Society
Rockosi, C.M. ; Gunn, J.E. ; Carr, M.A. ; Sekiguchi, M. ; Lvezic, Z. ; Munn, J.A.
Pub. info.:
Survey and other telescope technologies and discoveries : 27-28 August 2002, Waikoloa, Hawaii, USA. pp.180-188, 2002. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
13th International School on Quantum Electronics: Laser Physics and Applications. pp.317-326, 2005. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Komiyama, Y. ; Miyazaki, S. ; Yagi, M. ; Yasuda, N. ; Okamura, S. ; Sekiguchi, M. ; Doi, M. ; Shimasaku, K. ; Nakata, F. ; Furusawa, H. ; Kimura, M. ; Ouchi, M. ; Hamabe, M. ; Nakaya, H.
Pub. info.:
Instrument Design and Performance for Optical/Infrared Ground-based Telescopes. Part One pp.152-159, 2003. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering