Kikkawa, T. ; Oku, Y. ; Kohmura, K. ; Fujii, N. ; Tanaka, H. ; Ishikawa, A. ; Matsuo, H. ; Sonoda, Y. ; Miyoshi, H. ; Goto, T. ; Hata, N. ; Seino, Y. ; Takada, S. ; Yoshino, T. ; Kinoshita, K.
Pub. info.:
Nanofabrication: Technologies, Devices, and Applications. pp.153-157, 2005. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering