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Conference Proceedings

1. Correlation Between Annealing Temperature and Crystallinity of Si Films Prepared by Thermal Plasma Jet Crystallization Technique

Hirotaka Kaku ; Seiichiro Higashi ; Tatsuya Okada ; Hideki Murakami ; Seiichi Miyazaki

Pub. info.:	Amorphous and polycrystalline thin-film silicon science and technology--2006 : symposium held April 18-21, 2006, San Francisco, California, U.S.A.. pp.583-590, 2007. Warrendale, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	910

Conference Proceedings

2. Development of Si Microliquid Processing Using Piezo Actuator

Muneki Akazawa ; Shunki Koyanagi ; Seiichiro Higashi

Pub. info.:	Amorphous and polycrystalline thin-film silicon science and technology--2011 : symposium held April 25-29, 2011, San Francisco, California, U.S.A.. pp.407-412, 2012. Warrendale, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	1321

Conference Proceedings

3. Layer Transfer and Simultaneous Activation of Phosphorus Atoms in Silicon Films by Near-Infrared Semiconductor Diode Laser Irradiation

Yoshitaka Kobayashi ; Kohei Sakaike ; Shogo Nakamura ; Mitsuhisa Ikeda ; Akio Ohta ; Seiichiro Higashi

Pub. info.:	Amorphous and polycrystalline thin-film silicon science and technology - 2012 : symposium held April 9-13, 2012, San Francisco, California, U.S.A.. pp.275-280, 2012. Warrendale, PA. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	1426