1.

Conference Proceedings
Conference Proceedings
1. Safe Precursor Gas for Broad Replacement of SiH4 in Plasma Processes Employed in Integrated Circuit Production
Loboda, M. J. ; Seifferly, J. A. ; Grove, C. M. ; Schneider, R. F.
Pub. info.: Environmental, safety, and health issues in IC production : symposium held December 4-5, 1996, Boston, Massachusetts, U.S.A..  pp.145-,  1997.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 447
2.

Conference Proceedings
Conference Proceedings
2. PLASMA ETCHING AND SURFACE ANALYSIS OF a-SiC:H FILMS DEPOSITED BY LOW TEMPERATURE PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION
Thomas, J. H., III ; Loboda, M. J. ; Seifferly, J. A.
Pub. info.: Gas-phase and surface chemistry in electronic materials processing : symposium held November 29-December 2, 1993, Boston, Massachusetts, U.S.A..  pp.445-,  1994.  Pittsburgh, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 334