1.

Conference Proceedings
Conference Proceedings
1. THE ROLE OF ADSORPTION AND VAPOR PRESSURE IN FOCUSED ION BEAM INDUCED DEPOSITION OF CARBON FILMS
Kirch, S.J. ; Seeger, D.E.
Pub. info.: In-situ patterning : selective area deposition and etching : symposium held November 29-December 1, 1989, Boston, Massachusetts, U.S.A..  pp.229-234,  1990.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 158
2.

Conference Proceedings
Conference Proceedings
2. MEMS Fabrication for Wireless Communications Using Copper Interconnect Technology
Deligianni, H. ; Cotte, J.M. ; Jahnes, C.V. ; Buchwalter, P. ; Hoivik, N. ; Krishnan, M ; Tornello, J. ; Magerlein, J.H. ; Seeger, D.E.
Pub. info.: Electrochemical processes in ULSI and MEMS : proceedings of the international symposium.  pp.341-352,  2005.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2004-17
3.

Conference Proceedings
Conference Proceedings
3. Fabrication challenges for next-generation devices: MEMS for rf wireless communications (Invited Paper)
Seeger, D.E. ; Lund, J. ; Jahnes, C. ; Deligianni, L. ; Buchwalter, P. ; Andricacos, P.C. ; Acosta, R.E. ; Babich, I.V. ; Mahorowala, A.P. ; Rosner, J. ; Cotte, J.
Pub. info.: Emerging Lithographic Technologies VI.  Part One  pp.36-51,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4688