1.

Conference Proceedings
Conference Proceedings
1. Advanced exposure and focus control by proximity profile signature matching [6155-16]
Zhou, W. ; See, A. ; Yu, J.
Pub. info.: Data analysis and modeling for process control III : 23 February, 2006, San Jose, California, USA.  pp.61550H-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6155
2.

Conference Proceedings
Conference Proceedings
2. Matching poly layer ADI and AEI process windows by using ADI index [6155-17]
Zhou, W. ; Zou, Z. ; See, A.
Pub. info.: Data analysis and modeling for process control III : 23 February, 2006, San Jose, California, USA.  pp.61550I-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6155
3.

Conference Proceedings
Conference Proceedings
3. Thermal Curing of Hydrogen Silsesquioxane (HSQ)
Siew, Y.K. ; Sarkar, G. ; Hu, X. ; Hui, J. ; See, A. ; Chua, C.T.
Pub. info.: Low and High Dielectric Constant Materials : Materials Science, Processing, and Reliability Issues, proceedings of the fourth International Symposium and Thin Film Materials for Advanced Packaging Technologies : proceedings of the second International Symposium.  pp.143-155,  1999.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 99-7
4.

Conference Proceedings
Conference Proceedings
4. Impact of Indium and Boron Interaction on Short Channel and Reverse Short Channel Effects for NMOSFETs
Ong, S.Y. ; Chor, E.F. ; Lee, J. ; Leung, Y.K. ; See, A. ; Chan, L.
Pub. info.: ULSI Process Integration : proceedings of the International Symposium.  pp.305-312,  2001.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2001-2
5.

Conference Proceedings
Conference Proceedings
5. Comparisons of Polisher Designs on the Performance of STI Planarization
Goh, K ; Chen, F ; Balakumar, S. ; Higelin, G. ; See, A. ; Chan, L. ; Lin, C. ; Chern, C.
Pub. info.: Chemical mechanical planariarization in IC device manufacturing III : proceedings of the international symposium.  pp.57-70,  1999.  Pennington, N. J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 99-37
6.

Conference Proceedings
Conference Proceedings
6. Fundamental Issues in Rapid Thermal Annealing (RTA), Spike RTA and Excimer Laser Annealing (ELA) for the Formation of Shallow p+/n Junctions
Chong, Y.F. ; Pey, K.L. ; Wee, A.T.S. ; See, A. ; Tung, C.H. ; Lu, Y.F.
Pub. info.: Rapid thermal and other short-time processing technologies II : proceedings of the international symposium.  pp.311-320,  2001.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2001-9
7.

Conference Proceedings
Conference Proceedings
7. Evaluation of 02- and N2- Addition in Via Etching and CHF3/02 Post Etch Treatment
Ho, C.N. ; Higelin, G. ; Low, C.H. ; See, A. ; Chan, L. ; Chua, D.H.C.
Pub. info.: Plasma etching processes for sub-quarter micron devices : proceedings of the international symposium.  pp.269-283,  1999.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 99-30
8.

Conference Proceedings
Conference Proceedings
8. Characterization And Integration In Cu Damascene Structures Of AURORA, An Inorganic Low-k Dielectric
Siew, Y. ; Sarkar, G. ; Hu, X. ; Xu, Y. ; See, A.
Pub. info.: Materials, technology and reliability for advanced interconnects and low-k dielectrics : symposium held April 23-27, 2000, San Francisco, California, U.S.A..  pp.D5.14-,  2001.  Warrendale, PA.  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 612