1.

Conference Proceedings
Conference Proceedings
1. VISIBLE-WAVELENGTH LASER PHOTODEPOSITION OF COBALT INTERCONNECTS
Rothschild, M. ; Sedlacek, J.H.C. ; Shaver, D.C. ; Ehrlich, D.J. ; Bittenson, S.N. ; Edwards, Jr., D. ; Economou, N.P.
Pub. info.: In-situ patterning : selective area deposition and etching : symposium held November 29-December 1, 1989, Boston, Massachusetts, U.S.A..  pp.79-84,  1990.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 158
2.

Conference Proceedings
Conference Proceedings
2. Testing of optical materials for 193-nm applications
Liberman, V. ; Rothschild, M. ; Sedlacek, J.H.C. ; Uttaro, R.S. ; Grenville, A. ; Bates, A.K. ; Van Peski, C.
Pub. info.: Optical systems contamination and degradation : 20-23 July 1998, San Diego, California.  pp.411-418,  1998.  Bellingham, Wash., USA.  SPIE
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3427
3.

Conference Proceedings
Conference Proceedings
3. Contamination rates of optical surfaces at 157 nm: impurities outgassed from construction materials and from photoresists
Bloomstein, T.M. ; Sedlacek, J.H.C. ; Palmacci, S.T. ; Hardy, D.E. ; Liberman, V. ; Rothschild, M.
Pub. info.: Optical Microlithography XVI.  Part One  pp.650-661,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5040
4.

Conference Proceedings
Conference Proceedings
4. Long-term laser durability testing of optical coatings and thin films for 157-nm lithography
Liberman, V. ; Rorhschild, M. ; Palmacci, S.T. ; Efremow, N.N. ; Sedlacek, J.H.C. ; Grenville, A.
Pub. info.: Optical Microlithography XV.  Part One  pp.568-575,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4691
5.

Conference Proceedings
Conference Proceedings
5. Ambient effects on the laser durability of 157-nm optical coatings
Liberman, V. ; Rothschild, M. ; Palmacci, S.T. ; Efremow, N.N., Jr. ; Sedlacek, J.H.C. ; Grenville, A.
Pub. info.: Optical Microlithography XVI.  Part One  pp.487-498,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5040
6.

Conference Proceedings
Conference Proceedings
6. Accelerated damage to blank and antireflectance-coated CaF2 surfaces under 157-nm laser irradiation
Liberman, V. ; Rothschild, M. ; Palmacci, S.T. ; Efremow, N.N., Jr. ; Sedlacek, J.H.C. ; Grenville, A.
Pub. info.: Optical Microlithography XVI.  Part Three  pp.1631-1638,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5040
7.

Conference Proceedings
Conference Proceedings
7. Contamination rates of optical surfaces at 157 nm in the presence of hydrocarbon impurities
Bloomstein, T.M. ; Liberman, V. ; Rothschild, M. ; Palmacci, S.T. ; Hardy, D.E. ; Sedlacek, J.H.C.
Pub. info.: Optical Microlithography XV.  Part One  pp.709-723,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4691
8.

Conference Proceedings
Conference Proceedings
8. Behavior of candidate organic pellicle materials under 157-nm laser irradiation
Grenville, A. ; Liberman, V. ; Rothschild, M. ; Sedlacek, J.H.C. ; French, R.H. ; Wheland, R.C. ; Zhang, X. ; Gordan, J.
Pub. info.: Optical Microlithography XV.  Part Two  pp.1644-1653,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4691
9.

Conference Proceedings
Conference Proceedings
9. Photo-induced changes in 157-nm optical coatings
Liberman, V. ; Bloomstein, T.M. ; Rothschild, M. ; Palmacci, S.T. ; Sedlacek, J.H.C. ; Grenville, A.
Pub. info.: Optical Microlithography XVII.  pp.131-140,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5377