1.

Conference Proceedings
Conference Proceedings
1. CHARACTERIEATION OF ION IMPLANTED AND THIN EPITAXIAIL LAYER STRUCTURES USING PHOTOLUMINESCENCE
Hamilton, B. ; Sedgwick, T. O. ; Gelpey, J. C.
Pub. info.: Fundamentals of beam-solid interactions and transient thermal processing : symposium held November 30-December 3, 1987, Boston, Massachusetts, U.S.A..  pp.323-330,  1988.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 100
2.

Conference Proceedings
Conference Proceedings
2. NEW RELIABLE STRUCTURE FOR HIGH TEMPERATURE MEASUREMENT OF SILICON WAFERS USING A SPECIALLY ATTACHED THERMOCOUPLE
Cohen, S. A. ; Sedgwick, T. O. ; Speidell, J. L.
Pub. info.: Energy beam-solid interactions and transient thermal processing : symposium held November 1983 in Boston, Massachusetts, U.S.A..  pp.321-326,  1984.  New York.  North-Holland
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 23
3.

Conference Proceedings
Conference Proceedings
3. SHORT TIME ANNEALING OF As and B ION IMPLANTED Si USING TUNGSTEN-HALOGEN LAMPS
Sedgwick, T. O. ; Kalish, R. ; Mader, S. R. ; Shatas, S. C.
Pub. info.: Energy beam-solid interactions and transient thermal processing : symposium held November 1983 in Boston, Massachusetts, U.S.A..  pp.293-298,  1984.  New York.  North-Holland
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 23
4.

Conference Proceedings
Conference Proceedings
4. HEAVY PHOSPHOROUS DOPING OF EPITAXIAL SILICON AT LOW TEMPERATURE AND ATMOSPHERIC PRESSURE
Sedgwick, T. O. ; Agnello, P. D. ; Nguyen-Ngoc, D. ; Kuan, T. S. ; Scilla, G.
Pub. info.: Rapid thermal and integrated processing : symposium held April 30-May 3, 1991, Anaheim, California, U.S.A..  pp.493-498,  1991.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 224
5.

Conference Proceedings
Conference Proceedings
5. *RAPID THERMAL PROCESSING: HOW WELL IS IT DOING AND WHERE IS IT GOING?
Sedgwick, T. O.
Pub. info.: Rapid thermal processing of electronic materials : symposium held April 21-23, 1987, Anaheim California, U.S.A..  pp.3-14,  1987.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 92