Thin films : stresses and mechanical properties : symposium held November 28-30, 1988, Boston, Massachusetts, U.S.A.. pp.179-184, 1989. Pittsburgh, Pa.. Materials Research Society
Nauka, K. ; Amano, J. ; Scott, M.P. ; Weber, E.R. ; Turner, J.E. ; Tsai, R.
Pub. info.:
Materials issues in silicon integrated circuit processing : symposium held April 15-18, 1986, Palo Alto, California, U.S.A.. pp.319-324, 1986. Pittsburgh, Pa.. Materials Research Society