1.

Conference Proceedings
Conference Proceedings
1. Grating pitch measurements with the molecular measuring machine
Kramar,J. ; Jun,J.S. ; Penzes,W.B. ; Scire,F. ; Teague,E.C. ; Villarrubia,J.S.
Pub. info.: Recent advances in metrology, characterization, and standards for optical digital data disks : 21-22 July 1999, Denver, Colorado.  pp.46-53,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3806
2.

Conference Proceedings
Conference Proceedings
2. High-accuracy overlay measurements
Silver,R.M. ; Potzick,J.E. ; Scire,F. ; Larrabee,R.D.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography X.  pp.320-330,  1996.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2725
3.

Conference Proceedings
Conference Proceedings
3. Method to characterize overlay tool misalignments and distortions
Silver,R.M. ; Potzick,J.E. ; Scire,F. ; Evans,C.J. ; McGlauflin,M. ; Kornegay,E. ; Larrabee,R.D.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XI.  pp.143-155,  1997.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3050