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Pensl, G. ; Schulz, M. ; Stolz, P. ; Johnson, N. M. ; Gibbons, J. F. ; Hoyt, J. L.
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Rapid thermal and integrated processing VI : symposium held April 1-4, 1997, San Francisco, California, U.S.A.. pp.259-, 1997. Pittsburgh, PA. MRS - Materials Research Society
Laser metrology and inspection : 14-15 June 1999, Munich, Germany. pp.133-141, 1999. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
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Hoelzlien, Karlheinz ; Pensl, G. ; Schulz, M. ; Johnson N.M.
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Oxygen, carbon, hydrogen, and nitrogen in crystalline silicon : symposium held December 2-5, 1985, Boston, Massachusetts, U.S.A.. pp.481-486, 1986. Pittsburgh, Pa.. Materials Research Society