1.

Conference Proceedings
Conference Proceedings
1. Deposition of Titanium Nitride Films in a Stagnation Flow Reactor and Comparison With Model Predictions
Allendorf, M.D. ; Arsenlis, A. ; Bastasz, R. ; Evans, G.H. ; Larson, R.S. ; Schulberg, M.T.
Pub. info.: Proceedings of the Second International Symposium on Process Control, Diagnostics, and Modeling in Semiconductor Manufacturing.  pp.291-299,  1997.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 97-9
2.

Conference Proceedings
Conference Proceedings
2. KINETICS HYDROGEN DESORPTION FROM THE DIAMOND (110) SURFACE
Fox, C.A. ; Kubiak, G.D. ; Schulberg, M.T. ; Hagstrom, S.
Pub. info.: Proceedings of the Third International Symposium on Diamond Materials.  pp.64-70,  1993.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1993-17