1.

Conference Proceedings
Conference Proceedings
1. High-power ultraviolet all-solid-state laser for industrial applications
Mehlmann,C. ; Schroder,T. ; Klopp,P. ; Koch,R. ; Stamm,U. ; Basting,D.
Pub. info.: Laser applications in microelectronic and optoelectronic manufacturing IV : 25-27 January 1999, San Jose, California.  pp.396-402,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3618
2.

Conference Proceedings
Conference Proceedings
2. Long-term test and characterization of optical components at 193 nm and 157 nm
Vogler,K. ; Klaft,I. ; Schroder,T. ; Stamm,U. ; Mann,K.R. ; Apel,O. ; Gorling,C. ; Leinhos,U.
Pub. info.: Inorganic optical materials II : 1-3 August, 2000, San Diego, USA.  pp.255-260,  2000.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4102
3.

Conference Proceedings
Conference Proceedings
3. High-power 193-nm excimer lasers for DUV lithography
Patzel,R. ; Vogler,K. ; Albrecht,H.S. ; Schroder,T. ; Bragin,I. ; Kleinschmidt,J. ; Zschocke,W.
Pub. info.: Optical Microlithography XIV.  4346  pp.577-584,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4346