1.

Conference Proceedings
Conference Proceedings
1. Study of Pulsed RF DPN Process Parameters for 65 um node MOSFET Gate Dielectrics
Rothschild, A. ; Kraus, P.A. ; Chua, T.C. ; Nouri, F. ; Cubaynes, F.N. ; Veloso, A. ; Mertens, S. ; Date, L. ; Schreutelkamp, R. ; Schaekers, M.
Pub. info.: Integration of advanced micro- and nanoelectronic devices - critical issues and solutions : symposium held April 13-16, 2004, San Francisco, California, U.S.A..  pp.49-56,  2004.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 811
2.

Conference Proceedings
Conference Proceedings
2. Further Optimization of Plasma Nitridation of Ultra-thin Oxides for 65 nm 236 Node MOSFETs
Kraus, P.A. ; Chua, T.C. ; Rothschild, A. ; Cubaynes, F.N ; Veloso, A. ; Mertens, S. ; Date, L. ; Baue, T.M. ; Ahmed, K.Z. ; Campbell, J. ; Noun, F. ; Cruse, J. ; Schreutelkamp, R. ; Schaekers, M.
Pub. info.: Advanced short-time thermal processing for Si-based CMOS devices : proceedings of the international symposium.  pp.236-243,  2004.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2004-01
3.

Conference Proceedings
Conference Proceedings
3. Combined ΔL and Series Resistance Extraction of LDD MOSFETs at 77 K
Schreutelkamp, R. ; Martino, J.A. ; Simoen, E. ; Deferm, L. ; Ciaeys, C.
Pub. info.: Proceedings of the Symposium on Low Temperature Electronics and High Temperature Superconductivity.  pp.290-296,  1995.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 95-9
4.

Conference Proceedings
Conference Proceedings
4. Advanced .CDSEM matching methodology for OPC litho-cell-based matching verification [6152-106]
Adan, O. ; Cramer, H. ; Van Brederode, E. ; Schreutelkamp, R. ; Englard, I.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XX.  pp.61522Q-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6152