1.

Conference Proceedings
Conference Proceedings
1. Monte-Carlo Simulation of the Deposition Process in PVD-Technology
Lugscheider, E. ; Knotek, O. ; Loffler, F. ; Schnaut, U. ; Eckert, P.
Pub. info.: Modeling and simulation of thin-film processing : symposium held April 17-20, 1995, San Francisco, California, U.S.A..  pp.259-,  1995.  Pittsburgh.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 389
2.

Conference Proceedings
Conference Proceedings
2. Monte-Carlo Simulation of the Deposition Process in PVD-Technology
Lugscheider, E. ; Knotek, O. ; Loffler, F. ; Schnaut, U. ; Eckert, P.
Pub. info.: Rapid thermal and integrated processing IV : symposium held April 17-20, 1995, San Francisco, California, U.S.A..  pp.93-,  1995.  Pittsburgh, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 387