1.

Conference Proceedings
Conference Proceedings
1. Magnetism-based sensors
Ong,K.G. ; Jain,M.K. ; Mungle,C. ; Schmidt,S. ; Grimes,C.A.
Pub. info.: Complex mediums II : beyond linear isotropic dielectrics, 30 July-1 August, 2001, San Diego, USA.  pp.158-172,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4467
2.

Conference Proceedings
Conference Proceedings
2. Performance of 300-mm lithography tools in a pilot production line
Maltabes,J.G. ; Charles,A.B. ; Hornig,S.R. ; Schedel,T. ; Ganz,D. ; Schmidt,S.
Pub. info.: Optical microlithography XII : 17-19 March 1999, Santa Clara, California.  Part1  pp.483-496,  1999.  Bellingham, Wash., USA.  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3679
3.

Conference Proceedings
Conference Proceedings
3. Effect of nonlinear errors on 300-mm wafer overlay performance
Schmidt,S. ; Charles,A.B. ; Ganz,D. ; Hornig,S.R. ; Hraschan,G. ; Maltabes,J.G. ; Mautz,K.E. ; Metzdorf,T. ; Otto,R. ; Scheurich,J. ; Schedel,T. ; Schuster,R.
Pub. info.: Optical microlithography XIII : 1-3 March 2000, Santa Clara, USA.  Part2  pp.857-865,  2000.  Bellingham, Wash., USA.  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4000
4.

Conference Proceedings
Conference Proceedings
4. Process performance comparisons on 300-mm i-line steppers,DUV stepper,and DUV scanners
Schedel,T. ; Charles,A.B. ; Ganz,D. ; Hornig,S.R. ; Hraschan,G. ; Kostler,W. ; Maltabes,J.G. ; Mautz,K.E. ; Metzdorf,T. ; Otto,R. ; Schmidt,S. ; Schuster,R.
Pub. info.: Optical microlithography XIII : 1-3 March 2000, Santa Clara, USA.  Part1  pp.335-342,  2000.  Bellingham, Wash., USA.  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4000
5.

Conference Proceedings
Conference Proceedings
5. High-stability adjustable cryogenic-compatible beam-splitter mounts for the Composite Infrared Spectrometer(CIRS)for the Cassini mission to Saturn
Hagopian,J.G. ; Hayes,P.A. ; Crooke,J.A. ; Lyons,J.J.III ; Morell,A. ; French,T. ; Hersh,M. ; Lashley,C. ; Schmidt,S.
Pub. info.: Cryogenic optical systems and instruments VII : 8-9 August 1996, Denver, Colorado.  pp.81-91,  1996.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2814
6.

Conference Proceedings
Conference Proceedings
6. Is lithography ready for 300 mm?
Charles,A.B. ; Haris,C. ; Hornig,S.R. ; Ganz,D. ; Schedel,T. ; Hraschan,G. ; Kostler,W. ; Maltabes,J.G. ; Mautz,K.E. ; Schmidt,S. ; Schuster,R.
Pub. info.: Challenges in process integration and device technology : 18-19 September 2000, Santa Clara, USA.  pp.254-264,  2000.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4181
7.

Conference Proceedings
Conference Proceedings
7. Current state of 300-mm lithography in a pilot line environment
Charles,A.B. ; Maltabes,J.G. ; Hornig,S.R. ; Schedel,T. ; Ganz,D. ; Schmidt,S. ; Grant,L. ; Hraschan,G. ; Mautz,K.E. ; Otto,R.
Pub. info.: Process, equipment, and materials control in integrated circuit manufacturing V : 22-23 September, 1999, Santa Clara, California.  pp.140-153,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3882
8.

Technical Paper
Technical Paper
8. Assessment of SGS Models in LES Applied to a NACA 4412 Airfoil
Schmidt,S. ; Franke,M. ; Thiele,F.
Pub. info.: AIAA paper.  pp.1-8,  2001.  American Institute of Aeronautics and Astronautics
Title of ser.: AIAA Paper : Aerospace Sciences Meeting and Exhibit
Ser. no.: 2001