Schlaf, R. ; Sehnert, H. ; Pettenkofer, C. ; Jaegermann, W.
Pub. info.:
Heteroepitaxy of dissimilar materials : symposium held April 29-May 2, 1991, Anaheim, California, U.S.A.. pp.137-142, 1991. Pittsburgh, Pa.. Materials Research Society
Lang, O. ; Schlaf, R. ; Tomm, Y. ; Pettenkofer, C. ; Jaegermann, W.
Pub. info.:
Mechanisms of Heteroepitaxial growth : symposium held April 27-30, 1992, San Francisco, California, U.S.A.. pp.291-296, 1992. Pittsburgh, PA. Materials Research Society
Emirov, Y.N. ; Schumacher, J.D. ; Lagel, B. ; Nguyen, N. ; Ren, Z. ; Huang, Z. ; Rossie, B.B. ; Schlaf, R.
Pub. info.:
Metrology, Inspection, and Process Control for Microlithography XVIII. pp.1389-1392, 2004. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Emirov, Y.N. ; Beerbom, M. ; Walters, D.A. ; Ren, Z.F. ; Huang, Z.P. ; Rossie, B.B. ; Schlaf, R.
Pub. info.:
Metrology, Inspection, and Process Control for Microlithography XVII. 1 pp.493-495, 2003. Bellingham, WA. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Schlaf, R. ; Emirov, Y. ; Bieber, J.A. ; Sikder, A. ; Kohlscheen, J. ; Walters, D.A. ; Islam, M.R. ; Metha, B. ; Ren, Z.F. ; Shofner, T.L. ; Rossie, B.B. ; Cresswell, M.W.
Pub. info.:
Metrology, Inspection, and Process Control for Microlithography XVI. Part One pp.53-57, 2002. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering