1.

Conference Proceedings

Conference Proceedings
Landau, S. ; Kolbesen, B.O. ; Tillman, R. ; Bruchhaus, R. ; Olbrich, A. ; Fritsch, B. ; Dehm, C. ; Schindler, G. ; Hartner, W. ; Mazure, C.
Pub. info.: Silicon materials science and technology : proceedings of the Eighth International Symposium on Silicon Materials Science and Technology.  pp.789-797,  1998.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 98-1(1)
2.

Conference Proceedings

Conference Proceedings
Dehm, C. ; Schindler, G. ; Hartner, W. ; Bergmann, R. ; Hasler, B. ; Kasko, I. ; Kastner, M. ; Schiele, M. ; Weinrich, V. ; Mazure, C.
Pub. info.: ULSI process integration : proceedings of the first international symposium.  pp.73-88,  1999.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 99-18
3.

Conference Proceedings

Conference Proceedings
Bolten, D. ; Bottger, U. ; Grossmann, M. ; Lohse, O. ; Waser, R. ; Kastner, M. ; Schindler, G. ; Dehm, C.
Pub. info.: Ferroelectric thin films VIII : symposium held November 29-December 2, 1999, Boston, Massachusetts, U.S.A..  pp.301-,  2000.  Warrendale, PA.  MRS-Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 596
4.

Conference Proceedings

Conference Proceedings
Landau, S. A. ; Weiss, P-A. ; Junghans, N. ; Kolbesen, B. O. ; Adderton, D. ; Schindler, G. ; Hartner, W. ; Hintermaier, F. ; Dehm, C. ; Mazure, C.
Pub. info.: Ultrathin SiO[2] and high-K materials for USLI gate dielectrics : symposium held April 5-8, 1999, in San Francisco, California, U.S.A..  pp.567-,  1999.  Warrendale, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 567
5.

Conference Proceedings

Conference Proceedings
Grossmann, M. ; Lohse, O. ; Bolten, D. ; Waser, R. ; Hartner, W. ; Schindler, G. ; Nagel, N. ; Dehm, C.
Pub. info.: Ferroelectric thin films VII : symposium held November 30-December 3, 1998, Boston, Massachusetts, U.S.A..  pp.269-,  1999.  Warrendale, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 541
6.

Conference Proceedings

Conference Proceedings
Engelhardt, M. ; Schindler, G. ; Werner, C.
Pub. info.: Semiconductor technology (ISTC 2001) : proceedings of the 1st International Conference on Semiconductor Technology.  pp.206-215,  2001.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2001-17
7.

Conference Proceedings

Conference Proceedings
Steinlesberger, G. ; Engelhardt, M. ; Schindler, G. ; Steinhogl, W. ; Traving, M. ; Honlein, W. ; Bertagnolli, E.
Pub. info.: Materials, Technology and Reliability for Advanced Interconnects and Low-k Dielectrics-2003 : symposium held April 21-25, 2003, San Francisco, California, U.S.A..  pp.379-384,  2003.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 766
8.

Conference Proceedings

Conference Proceedings
Engelhardt, M. ; Schindler, G. ; Steinhogl, W. ; Steinlesberger, G. ; Traving, M.
Pub. info.: Materials, technology and reliability for advanced interconnects and low-k dielectrics - 2004 : symposium held April 13-15, 2004, San Francisco, California, U.S.A..  pp.261-266,  2004.  Warrendale.  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 812
9.

Conference Proceedings

Conference Proceedings
Lohse, O. ; Bolten, D. ; Grossmann, M. ; Waser, R. ; Hartner, W. ; Schindler, G.
Pub. info.: Ferroelectric thin films VI : symposium held November 30-December 4, 1997, Boston, Massachusetts, U.S.A..  pp.267-,  1998.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 493