1.

Conference Proceedings

Conference Proceedings
Schoot,J.van ; Finders,J. ; Schenau,K.van Ingen ; Klaassen,M. ; Buijk,C.
Pub. info.: Optical microlithography XII : 17-19 March 1999, Santa Clara, California.  Part1  pp.250-260,  1999.  Bellingham, Wash., USA.  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3679
2.

Conference Proceedings

Conference Proceedings
Schenau,K.van Ingen ; Vleeming,B. ; Ansem,W.F.Gehoel-van ; Wong,P. ; Vandenberghe,G.N.
Pub. info.: Advances in resist technology and processing XVIII.  4345  pp.200-210,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4345