1.

Conference Proceedings
Conference Proceedings
1. Frequency-selective silicon vibration sensor with direct electrostatic stiffness modulation
Scheibner, D. ; Wibbeler, J. ; Mehner, J. ; Braemer, B. ; Gessner, T. ; Doetzel, W.
Pub. info.: Design, test, integration, and packaging of MEMS/MOEMS 2002 : 6-8 May, 2002, Cannes, France.  pp.325-332,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4755
2.

Conference Proceedings
Conference Proceedings
2. Bonding and deep RIE: a powerful combination for high-aspect-ratio sensors and actuators
Hiller, K. ; Kuchler, M. ; Billep, D. ; Schroter, B. ; Dienel, M. ; Scheibner, D. ; Gessner, T.
Pub. info.: Micromachining and Microfabrication Process Technology X.  pp.80-91,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5715