1.

Conference Proceedings

Conference Proceedings
Lin,F. ; De Souza,R. ; Dynes,R. ; Lu,S. ; Schay,P. ; Grizzard,L. ; Plutino,T. ; Welches,D.
Pub. info.: In-Line Characterization Techniques for Performance and Yield Enhancement in Microelectronic Manufacturing II :23-24 September 1998 Santa Clara, California.  pp.154-161,  1998.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3509
2.

Conference Proceedings

Conference Proceedings
Lin,F. ; Burt,C. ; Schay,P. ; Stih,J. ; John,J. ; Hampton,F.L.
Pub. info.: In-Line Characterization Techniques for Performance and Yield Enhancement in Microelectronic Manufacturing.  pp.2-9,  1997.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3215