1.

Conference Proceedings
Conference Proceedings
1. Laser processing system for microdrilling of printed circuit boards
Nishimae,J. ; Satoh,Y. ; Kojima,T. ; Fukushima,T.
Pub. info.: First International Symposium on Laser Precision Microfabrication : 14-16 June 2000, Omiya, Saitama, Japan.  pp.209-211,  2000.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4088
2.

Conference Proceedings
Conference Proceedings
2. Recent progress in repair accuracy of the focused ion-beam mask repair system
Aita,K. ; Yasaka,A. ; Kitamura,T. ; Matsumura,H. ; Satoh,Y. ; Nakamura,H. ; Fujikawa,J. ; Tsuchiya,K. ; Noguchi,S.
Pub. info.: Photomask and X-Ray Mask Technology III.  pp.324-335,  1996.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2793
3.

Conference Proceedings
Conference Proceedings
3. Performance of gas-assisted FIB repair for opaque defects
Satoh,Y. ; Nakamura,H. ; Fujikawa,J. ; Tsuchiya,K. ; Noguchi,S. ; Aita,K. ; Yasaka,A.
Pub. info.: 16th Annual BACUS Symposium on Photomask Technology and Management.  pp.124-137,  1996.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2884