1.

Conference Proceedings
Conference Proceedings
1. CMOS-compatible wells for integrated high-speed screening array
Gray, B.L. ; Moerman, R. ; van den Doel, L.R. ; Dietrich, H.R.C. ; Iordanov, V.P. ; Pham, N.P. ; Sarro, P.M. ; Bossche, A. ; Vellekoop, M.J.
Pub. info.: Biomedical nanotechnology architectures and applications : 20-24 January 2002, San Jose, USA.  pp.103-108,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4626
2.

Conference Proceedings
Conference Proceedings
2. Model corrector integrated in silicon: possibilities for implementation
Loktev, M.Y. ; Vdovin, G.V. ; Sarro, P.M.
Pub. info.: Optics in atmospheric propagation and adaptive systems V :24-27 September 2002, Agia Pelagia, Crete, Greece.  pp.196-205,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4884
3.

Conference Proceedings
Conference Proceedings
3. Development of a silicon-based modal liquid crystal wavefront corrector
Loktev, M.Y. ; Vdovin, G.V. ; Sarro, P.M.
Pub. info.: Photonics, devices, and systems II :Proceedings from PHOTONICS PRAGUE 2002, 26-29 May 2002, Prague, Czech Republic, Miroslav Hrabovský, Dagmar Senderáková, Pavel Tománek, chairs/editors ; Organized by CSSF--Czech and Slovak Society for Photonics, Tech-Market.  pp.558-564,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5036
4.

Conference Proceedings
Conference Proceedings
4. Influence of Deposition Parameters and Temperature on Stress and Strain of In Situ Doped PECVD Silicon Carbide
Pham, H.T.M. ; de Boer, C.R. ; Pakula, L. ; Sarro, P.M.
Pub. info.: Silicon carbide and related materials 2001 : ICSCRM2001, proceedings of the International Conference on Silicon Carbide and Related Materials 2001, Tsukuba, Japan, October 28-November 2, 2001.  pp.759-762,  2002.  Zuerich, Switzerland.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 389-393
5.

Conference Proceedings
Conference Proceedings
5. Technological aspects of a custom CMOS sensor for adaptive optics
Monteiro, D.W.L. ; Vdovin, G.V. ; Sarro, P.M.
Pub. info.: Photonics, devices, and systems II :Proceedings from PHOTONICS PRAGUE 2002, 26-29 May 2002, Prague, Czech Republic, Miroslav Hrabovský, Dagmar Senderáková, Pavel Tománek, chairs/editors ; Organized by CSSF--Czech and Slovak Society for Photonics, Tech-Market.  pp.31-36,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5036
6.

Conference Proceedings
Conference Proceedings
6. Low-cost technological approaches to micromachined spatial light modulators
Sakarya, S. ; Vdovin, G.V. ; Sarro, P.M.
Pub. info.: High-resolution wavefront control : methods, devices and applications IV : 8-9 July 2002, Seattle, Washington, USA.  pp.264-271,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4825
7.

Conference Proceedings
Conference Proceedings
7. Plasma-Assisted Atomic Layer Deposition of TiN Films at Low Process Temperature for High-Aspect Ratio Applications
Heil, S.B.S. ; Langereis, E. ; Roozeboom, F. ; Kemmere, A. ; Pham, N.P. ; Sarro, P.M. ; van-de-Sanden, M.C.M. ; Kessels, W.M.M.
Pub. info.: Materials, technology and reliability of advanced interconnects - 2005 : symposium held March 28-April 1, 2005, San Francisco, California, U.S.A..  pp.215-220,  2005.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 863
8.

Conference Proceedings
Conference Proceedings
8. New etchant for the fabrication of porous silicon
O'Halloran, G.M. ; Kuhl, M. ; Sarro, P.M. ; Gennison, P.T.J. ; French, P.J.
Pub. info.: Proceedings of the First Symposium on III-V Nitride Materials and Processes.  pp.180-185,  1996.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 96-11
9.

Conference Proceedings
Conference Proceedings
9. Electrical Characteristics of Plasma-Enhanced Chemical Vapor Deposited Silicon Carbide Thin Films
Pham, H.T.M. ; Akkaya, T. ; de Boer, C.R. ; Sarro, P.M.
Pub. info.: Silicon carbide and related materials 2002 : ECSCRM2002, proceedings of the 4th European Conference on Silicon Carbide and Related Materials, September 2-5, 2002, Linköping, Sweden.  pp.451-454,  2003.  Zuerich, Switzerland.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 433-436
10.

Conference Proceedings
Conference Proceedings
10. Influence of Deposition Parameters and Temperature on Stress and Strain of In Situ Doped PECVD Silicon Carbide
Pham, H.T.M. ; de Boer, C.R. ; Pakula, L. ; Sarro, P.M.
Pub. info.: Silicon carbide and related materials 2001 : ICSCRM2001, proceedings of the International Conference on Silicon Carbide and Related Materials 2001, Tsukuba, Japan, October 28-November 2, 2001.  pp.759-762,  2002.  Zuerich, Switzerland.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 389-393