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Conference Proceedings

1. Cost modeling of low-temperature large-area polysilicon thin film transistor liquid crystal display manufacturing

Jurichich,S. ; Wood,S.C. ; Saraswat,K.C.

Pub. info.:	Active matrix liquid crystal displays technology and applications : 10-11 February, 1997, San Jose, California. pp.160-165, 1997. Bellingham, Washington. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3014

Conference Proceedings

2. Effect of a silicon interlayer in low-temperature poly-SiGe thin film transistors

Wang,A.W. ; Saraswat,K.C.

Pub. info.:	Active matrix liquid crystal displays technology and applications : 10-11 February, 1997, San Jose, California. pp.133-140, 1997. Bellingham, Washington. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3014

Conference Proceedings

3. Response surface optimization for high-performance solid-phase crystallized silicon-germanium thin film transistors

Subramanian,V. ; Saraswat,K.C. ; Hovagimian,H. ; Mehlhaff,J.

Pub. info.:	Active matrix liquid crystal displays technology and applications : 10-11 February, 1997, San Jose, California. pp.127-132, 1997. Bellingham, Washington. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3014

Conference Proceedings

4. In-situ simultaneous measurement of temperature and thin film thickness with ultrasonic techniques

Khuri-Yakub,B.T. ; Pei,J. ; Degertekin,F.L. ; Saraswat,K.C.

Pub. info.:	Nondestructive Evaluation for Process Control in Manufacturing. pp.131-135, 1996. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	2948