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11 results

Conference Proceedings

1. *SINGLE WAFER RAPID THERMAL MULTIPROCCESSING

Saraswat, Krishna C. ; Moslehi, Mehrdad M. ; Grossman, David D. ; Wood, Sam ; Wrigjt, Peter ; Booth, Len

Pub. info.:	Rapid thermal annealing/chemical vapor deposition and integrated processing : sympoisium held April 25-28, 1989, San Diego, California, U.S.A.. pp.3-14, 1989. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	146

Conference Proceedings

2. A Low-Temperature Polycrystalline Si TFT Technology for Larg-Area AMLCD Drivers

Saraswat, Krishna C. ; Subramanian, V. ; Jurichich, S.

Pub. info.:	Polycrystalline thin films : structure, texture, properties and applications III : symposium held March 31-April 3, 1997, San Francisco, California, U.S.A.. pp.439-, 1997. Pittsburgh, Pa.. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	472

Conference Proceedings

3. Passivation of Poly-Si Thin-Film Transistors With Ion-Implanted Deuterium

Wang, Albert W. ; Saraswat, Krishna C.

Pub. info.:	Flat-panel display materials--1998 : symposium held April 13-17, 1998, San Francisco, California, U.S.A.. pp.85-, 1998. Warrendale, Pa.. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	508

Conference Proceedings

4. TMCTS for Gate Dielectric in Thin-Film Transistors

Wang, Albert W. ; Bhat, Navakanta ; Saraswat, Krishna C.

Pub. info.:	Flat panel display materials II : symposium held April 8-12, 1996, San Francisco, California, U.S.A.. pp.281-, 1997. Pittsburgh, Pa.. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	424

Conference Proceedings

5. Physical and electrical properties of polycrystalline silicon thin films

Saraswat, Krishna C.

Pub. info.:	Grain boundaries in semiconductors : proceedings of the Materials Research Society annual meeting, November 1981, Boston Park Plaza Hotel, Boston, Massachusetts, U.S.A.. pp.261-274, 1982. New York. North-Holland
Title of ser.:	Materials Research Society symposia proceedings
Ser. no.:	5

Conference Proceedings

6. Evidence for Heterojunction Effects in Polycrystalline Si1-xGex Thin Film Transistors With Si Caps

Wang, Albert W. ; Saraswat, Krishna C.

Pub. info.:	Epitaxy and applications of si-based heterostructures : symposium held April 13-17, 1998, San Francisco, California, U.S.A.. pp.145-, 1998. Warrendale, Pa.. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	533

Conference Proceedings

7. Effect of Growth Conditions on the Reliability of Ultrathin MOS Gate Oxides

Yang, Tien-Chun ; Saraswat, Krishna C.

Pub. info.:	Materials reliability in microelectronics VI : symposium held April 8-12, 1996, San Francisco, California, U.S.A.. pp.355-, 1996. Pittsburgh, Pa.. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	428

Conference Proceedings

8. TEMPERATURE UNIFORMITY OPTIMIZATION USING THREE-ZONE LAMP AND DYNAMIC CONTROL IN RAPID THERMAL MULTIPROCESSOR

Apte, Pushkar P. ; Wood, Samuel ; Booth, Len ; Saraswat, Krishna C. ; Moslehi, Mehrdad M.

Pub. info.:	Rapid thermal and integrated processing : symposium held April 30-May 3, 1991, Anaheim, California, U.S.A.. pp.209-214, 1991. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	224

Conference Proceedings

9. (20.5) 4:35 - 4:55 PM - Effects of Hydrogen Annealing on Heteroepitaxial-Ge layers on Si : Surface Roughness and Electrical Quality

Nayfeh, A. ; Chui, C. O. ; Saraswat, Krishna C. ; Yonehara, T. (Stanford University)

Pub. info.:	SiGe: materials, processing, and devices : proceedings of the First international symposium. pp.1189-1194, 2004. Pennington, N.J.. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	2004-07

10.

Conference Proceedings

10. DEMONSTRATION OF MULTIPROCESSING BY SILICON EPITAXY FOLLOWING IN-SITU CLEANING

Apte, Pushkar P. ; Venkatraman, Ramnath ; Saraswat, Krishna C. ; Moslehi, Mehrdad M. ; Yeakley, Richard

Pub. info.:	Rapid thermal and integrated processing : symposium held April 30-May 3, 1991, Anaheim, California, U.S.A.. pp.273-278, 1991. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	224

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